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ДРКП |
ДРКС |
ДРКУ |
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Диапазон измерения |
Ось X |
100 мм-200 мм |
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|
Разрешение по оси X |
0,01 мкм |
5 нм |
2 нм |
|
|
Ось Z1 |
±5 мм/±8 мм/±12 мм |
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Разрешение по оси Z1 |
0,01 мкм |
5 нм |
2 нм |
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|
Ось Z (столбец) |
450 мм-550 мм |
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|
Точность контура |
Линейная точность X |
± (1,0 + 0,02 л) мкм |
± (0,6 + 0,02 л) мкм |
± (0,4 + 0,02 л) мкм |
|
Линейная точность Z1 |
± (0,4 + 0,02H) мкм |
± (0,3 + 0,02H) мкм |
± (0,2 + 0,02H) мкм |
|
|
Угол |
≤1′ |
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Дуга |
≤±(1,0+R/12) мкм |
≤±(0,8+R/12)мкм |
≤±(0,5+R/12)мкм |
|
|
Дуговая точка |
≤0,5 мкм |
≤0,3 мкм |
≤0,25 мкм |
|
|
Прямолинейность |
0,4 мкм/100 мм |
0,3 мкм/100 мм |
0,2 мкм/100 мм |
|
|
Точность шероховатости |
Ошибка индикации |
±(5 нм + 0,035 Å) мкм |
±(4 нм + 0,03 Å) мкм |
±(2 нм + 0,02 А) мкм |
|
Шум остаточного значения |
≤0,006 мкм |
≤0,004 мкм |
≤0,002 мкм |
|
|
Повторяемость показаний |
3% |
2% |
2% |
|
Measure both roughness and contour
Resolution up to 0.001μm
Automatic data calibration
High-precision horizontal X-axis
Capable of measuring various data: contour measurement, roughness, original profile, and waviness
Приложения
Automotive Manufacturing Industry
Inspects the surface roughness and contour parameters of key components such as engine parts, gearbox gears, pistons, and crankshafts to ensure assembly fit.
Aerospace Industry
Used for contour and roughness inspection of aero-engine blades, landing gear structural components, and precision aerospace parts to meet high reliability requirements.
Precision Machining Industry
Inspects the tooth profile, threads, grooves, and other contour parameters and roughness of precision components such as cutting tools, molds, bearings, and lead screws to ensure machining accuracy.
Mold Industry
Inspects the contour and roughness of cavities and cores of injection molds and stamping dies to ensure consistency between mold processing quality and finished products.
Примеры применения
Основные моменты
1
Integrated Roughness & Contour Synchronous Measurement
The ultra-high-resolution sensor simultaneously measures both roughness and contour dimensions, eliminating the need for sensor replacement during measurement.
2
1nm Ultra-Precision Interferometric Grating Measurement
Utilizes an interferometric scanning grating scale, achieving a resolution of up to 1nm, enabling ultra-high-precision measurements.
3
Non-planar Surface Measurement Error Compensation
Unique roughness evaluation algorithms and position compensation methods effectively correct and compensate for measurement errors caused by non-planar surfaces.
4
Irregular Surface All-in-one Precision Measurement
A wide range and high precision are combined to meet the needs of all-in-one measurement of the roughness and dimensions of irregular surfaces such as arcs, cylinders, and free-form surfaces.
5
Customizable Template & Batch Auto-annotation
Customizable templates, batch measurement, and automatic annotation.
6
Zero-friction Guide Rail High-precision Benchmark
A near-zero friction guide rail, requiring no mathematical corrections, maintains a high-precision measurement benchmark for consistent accuracy.
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