|
DRCP |
DRCS |
DRCU |
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|
측정 범위 |
X축 |
100mm-200mm |
||
|
X축 해상도 |
0.01μm |
5nm |
2nm |
|
|
Z1축 |
±5mm/±8mm/±12mm |
|||
|
Z1축 해상도 |
0.01μm |
5nm |
2nm |
|
|
Z축(세로) |
450mm-550mm |
|||
|
윤곽선 정확도 |
선형 정확도 X |
±(1.0+0.02L)μm |
±(0.6+0.02L)μm |
±(0.4+0.02L)μm |
|
선형 정확도 Z1 |
±(0.4+0.02H)μm |
±(0.3+0.02H)μm |
±(0.2+0.02H)μm |
|
|
각도 |
≤1′ |
|||
|
호 |
≤±(1.0+R/12)μm |
≤±(0.8+R/12)μm |
≤±(0.5+R/12)μm |
|
|
아크 포인트 |
≤0.5μm |
≤0.3μm |
≤0.25μm |
|
|
직선 |
0.4μm/100mm |
0.3μm/100mm |
0.2μm/100mm |
|
|
거칠기 정확도 |
표시 오류 |
±(5nm+0.035A)μm |
±(4nm+0.03A)μm |
±(2nm+0.02A)μm |
|
잔차 값 노이즈 |
≤0.006μm |
≤0.004μm |
≤0.002μm |
|
|
표시 반복성 |
3% |
2% |
2% |
|
Measure both roughness and contour
Resolution up to 0.001μm
Automatic data calibration
High-precision horizontal X-axis
Capable of measuring various data: contour measurement, roughness, original profile, and waviness
응용
Automotive Manufacturing Industry
Inspects the surface roughness and contour parameters of key components such as engine parts, gearbox gears, pistons, and crankshafts to ensure assembly fit.
Aerospace Industry
Used for contour and roughness inspection of aero-engine blades, landing gear structural components, and precision aerospace parts to meet high reliability requirements.
Precision Machining Industry
Inspects the tooth profile, threads, grooves, and other contour parameters and roughness of precision components such as cutting tools, molds, bearings, and lead screws to ensure machining accuracy.
Mold Industry
Inspects the contour and roughness of cavities and cores of injection molds and stamping dies to ensure consistency between mold processing quality and finished products.
적용사례
하이라이트
1
Integrated Roughness & Contour Synchronous Measurement
The ultra-high-resolution sensor simultaneously measures both roughness and contour dimensions, eliminating the need for sensor replacement during measurement.
2
1nm Ultra-Precision Interferometric Grating Measurement
Utilizes an interferometric scanning grating scale, achieving a resolution of up to 1nm, enabling ultra-high-precision measurements.
3
Non-planar Surface Measurement Error Compensation
Unique roughness evaluation algorithms and position compensation methods effectively correct and compensate for measurement errors caused by non-planar surfaces.
4
Irregular Surface All-in-one Precision Measurement
A wide range and high precision are combined to meet the needs of all-in-one measurement of the roughness and dimensions of irregular surfaces such as arcs, cylinders, and free-form surfaces.
5
Customizable Template & Batch Auto-annotation
Customizable templates, batch measurement, and automatic annotation.
6
Zero-friction Guide Rail High-precision Benchmark
A near-zero friction guide rail, requiring no mathematical corrections, maintains a high-precision measurement benchmark for consistent accuracy.
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